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  1. Photomask Fabrication
    1. External Photomask Suppliers
    2. Heidelberg DWL66FS
  2. Spin Coating
    1. SCS G3P-8 Spin Coater
    2. SCS 6800 Spin Coater
  3. Optical Lithography
    1. Suss MA 6 Mask Aligner
      1. Bond Align
      2. Back side alignment
    2. Suss MJB-3 Mask Aligner
    3. Suss MJB4 Mask Aligner
  4. Electron Beam Lithography
    1. JEOL JBX-8100FS
    2. Raith e_LiNE
  5. Nanoimprint Lithography: Nanonex NX-2000
  6. Interference Lithography System
  7. Photoresist Dry Film Laminator
  8. Laser Cutting: ULS PLS6MW Laser Cutter
  9. Processing
    1. Cleanliness
    2. Solvents
    3. Photoresist Adhesion Promotion
    4. Photoresists
    5. Development
    6. Lift-off and Metal adhesion
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1 Comment

  1. The MA6 does not currently have specific instructions for the bond align and back side alignment functions. These will be added in the future.